A moving-coil designed micro-mechanics tester with application on MEMS
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Measurement Science and Technology
سال: 2007
ISSN: 0957-0233,1361-6501
DOI: 10.1088/0957-0233/18/11/046